Based on the theory and practice of high tech industrial division, especially of regional division based on value chain, this paper verifies the different requirements for factors and location of main value added parts of high tech industry's value chain and the spatial distribution of main value added activities of some high tech enterprises in Zhongguancun by analyzing the questionnaires for them, and draws a conclusion that Beijing's high tech industry has formed rudimental regional division based on value chain. The R&D departments of many high tech enterprises mostly agglomerate in Beijing, especially in Zhongguancun; the manufacturing departments of them are distributed all over China, even overseas, and the marketing departments of these enterprises mainly agglomerate in Beijing and global network is forming, which means Beijing has become a special region with headquarters, R&D departments and marketing departments of high tech enterprises concentrated in China. The rudimental regional division based on value chain of high tech industry in Beijing reflects the condition of Beijing's factor endowment in our country, shows Beijing's advantages in developing high tech industry, and verifies that different value added activities of high tech enterprises have different locational preferences. The R&D departments are generally located in the places where there are plenty of professionals with high ability, scientific research institutions, and convenient information acquiring and communicating. Locating the manufacturing departments, the enterprises think a good policy environment, a strong industrial cluster, convenient transportation, cheap land price and convenient provision with raw and processed materials and components are important. The marketing departments are often located in the places with convenient transportation, perfect marketing network, convenient communication network and large demands. This paper summarizes the different value added activities of the value chain such as headquarter, R&D, manufacturing and marketing, and the mode of high tech industrial regional division based on value chain, which is divided into basic activities and assistant activities according to Michael E.Porter's Value Chain Theory. Based on the condition of Beijing's high tech industrial regional division and the difference of factor endowment among districts in Beijing, the paper discusses the developing trend of Beijing's high tech industrial regional division based on value chain in future.